Abstract
AbstractCertain perfluorocompounds (PFCs) - including CF4, C2F6, SF6, and NF3 - are widely used in gas phase thin film processing applications such as dry etching and CVD chamber cleaning. Through a combination of long atmospheric lifetimes and high infrared absorption cross sections, many PFCs have high global warming potentials (GWPs). Abatement of PFC emissions from semiconductor applications is consistent with existing and developing international, national, and industrial policies for the control of greenhouse gas emissions. For PFC applications in the semiconductor industry, there exist a number of promising options for emissions control. These options include destruction (comprising combustion, plasma, and chemical-thermal routes), recovery, and process replacement.
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