Abstract
Laser induced fluorescence measurements of the parallel and perpendicular ion temperatures in a helicon source indicate the existence of a substantial ion temperature anisotropy, . The magnitude of the ion temperature anisotropy depends linearly on the source magnetic field. The parallel ion temperature is independent of magnetic field strength while the perpendicular temperature increases linearly with increasing magnetic field. Bohm-like particle confinement is proposed as an explanation for the linear dependence on magnetic field of the perpendicular ion temperature. In the helicon mode, the ion temperature components are independent of RF driving frequency and power and show a trend towards isotropy at high neutral fill pressures.
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