Abstract

The magnetic states of flux concentrators (FCs), consisting of poles and yokes with lateral dimensions in the range of 100 μm and integrating either single layer films of amorphous alloys of Cox(Zr–Nb)1−x with x=90 and x=88 or a synthetic antiferromagnet (SAF) of (NiFe/Ru)xn, are analyzed by Bitter pattern and magnetic force microscopy. Magnetic field sensors, placed in the gap of the FC by microfabrication processes, exhibited magnetoresistive responses strongly correlated with the magnetic states of the FC. The hysteresis of the field produced by the FC is reduced to a minimum when the SAF is used.

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