Control of growth mode of multiwalled carbon nanotubes

Abstract

We have conducted an experimental study to investigate the synthesis of multi-walled carbon nanotubes (CNTs) by a dc plasma-enhanced chemical vapour deposition (PECVD) technique. The synthesis of base and tip-type of CNTs was selectively controlled by changing the catalyst size, catalyst film thickness correlated with altering the NH3 pretreatment plasma current. These types of CNT showed distinctive properties in nanotube structure, growth rate and vertical alignment, which were confirmed by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and in situ optical interference measurement. The vertically aligned behaviour of CNT was systematically studied by using a fine-patterned catalyst layer with diverse critical dimensions. Freestanding single CNT was successfully realized by optimum tip-type CNT growth, conventional photolithography and wet-etch process.