Abstract
Boronization at near room temperature has been performed in plasma processing teststand (PPT) by using a 5% diborane gases B 2H 6 in He on electrically floating or cathode potential Al samples under various DC glow discharge conditions as a function of power or total gas pressure. The hydrogen concentration was analyzed by using elastic recoil detection method (ERD) and a new modified normalizing technique with Rutherford back scattering (RBS). Results showed that a high growth rate of film formation and floating surface were effective in reducing hydrogen concentration in B films. This result was in good agreement with earlier measurements of H with flash filament (FF) desorption method. In particular it was presumed from the experiments that the H B ratio was reduced by decreasing energetic ions but increasing radicals for B film formation.
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