Abstract
Abstract Effects of target-substrate (TS) distance during pulsed laser deposition process on the chemical structure and lithium-ion conductivity of amorphous lithium phosphate (LPO) thin films are investigated. The shorter TS distance results in lower Li concentration, longer phosphate chain, and higher ionic conductivity. The ionic conductivity of 2.7 × 10−7 S/cm is obtained at 25 °C in the LPO thin film with short TS distance.
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