Control method of pull-in voltage on the MEMS inertial switch integrating actuator and sensor

Abstract

Pull-in instability continues to become increasingly important for the inertia switch owing the lower pull-in voltage. The model of double cantilever beam was used to reduce the pull-in voltage. Mathematical model of the pull-in voltage could be built to understand what influence the processing errors of structure parameters make on the stability of pull-in voltage. Based on this model verified by simulation, the control method could be put forward to improve the stability of pull-in voltage. With the help of LIGA technology and the measure system built based on the architect platform, the experimental results showed that the used control method was better, which had been validated by corresponding experiments. According to the established model, the pull-in voltage of different structures showed that the structure proposed in this paper had a lower pull-in voltage.