Abstract
We describe in this paper an extension of the 2-DOF fine positioner reported in 1985 [1]. The extension combines x and y translational motion with rotation ρz about the z axis, allowing general planar alignment tasks to be performed. The device is a compact combination of 3-D OF linear motor, flexure springs, position sensor and digital controller. The semiconductor lateral-effect method used for position sensing is extended to include measurement of rotation. A new suspension system based on flexing rods substantially cancels unwanted z motion and motor gap change associated with the 2-DOF device, but introduces highly resonant structural vibration modes that need to be controlled. This paper briefly describes the new device, discusses the issues involved in controlling it, presents several controller designs, and reports their performance.
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