Abstract
Characterization of the effects of the interaction between short laser pulses and a material has been made in the conditions of ceramic micro- machining. Fast heating of the target surface results in a pressure wave that propagates inside the sample and a shock wave in the surrounding gas medium. By monitoring the energy of the shock wave using a laser beam deflection technique and a piezoelectric transducer, it is possible to relate the ablation rate to the observed signals. Experiments have been made using Q-switched Nd:YAG and KrF lasers. At high fluences, in particular at 1,06 urn, gas breakdown drastically alters the process conditions and disperses the recorded data. Nevertheless, we have determined the range of validity for monitoring of the process using simple detection devices.
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