Abstract

The aim of this article in continuation of Parts I [1] and II [2] is the interpretation of the TEOS mass spectrum as a precursor in the sol-gel process. In Part I [1] the primary fragmentation ions at masses 207, 193, 179 and 163 were obtained experimentally by B/E linked scan by radical induced fragmentation reactions. In Part II [2] eliminations of neutral fragments from the primary ions and the obtained ions by consecutive elimination reactions were evidenced experimentally by the B/E and B/E(1-E)1/2 linked scans. In this third and final Part of interpretation of the TEOS mass spectrum, the separation of ions by mass spectrometry at high resolutions of 5000 and 6600, relative to standard resolution 1000, and measurements of the M+1 and M+2 isotopic effects at the resolution of 5000 are presented. The separation of the ions with nominal mass 105 at high resolution is detailed.

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