Abstract
In order to better understand the behaviour of piezoelectric films when probed with an Atomic Force Microscope, we have modeled the system cantilever/probe/piezoelectric thin film/silicon substrate with a home-made finite elements method. The results of the simulation in terms of amplitude of vibration are compared with real piezoelectric measurements performed with a commercial AFM instrument on a PZT thin film formed by rf-magnetron sputtering. The possibility of operating quantitative and very local measurements of the piezoelectric coefficients is discussed using this operating mode.
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