Abstract
The converse piezoelectric response of a thin film constrained by a substrate is analyzed in different geometries under various boundary conditions. We considerthe effects of elastic deformation of the substrate on the total displacement of thefilm surface induced by the electric field. The change of film thickness and the bending curvature of a film/substrate couple are calculated. For a thin film island clamped on a large thick substrate, the theoretical estimation of the piezoresponse, including a local bending in the vicinity of the island/substrate interface, is in agreement with the finite element calculation.
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