Continuously variable Fourier filters fabricated using varying angle glancing angle deposition for chip-scale spectroscopy.

Abstract

Low-cost spectroscopy has received a great deal of attention in recent years in applications such as food inspection, disease detection, and manufacturing. Current spectroscopic systems rely on multiple optical components, making them mechanically fragile systems. In our previous work, we demonstrated the use of Fourier filtering using thin dielectric films. The sampling effect from the cavity resonances can be used to decompose a signal into its Fourier components. Although the thin films were deposited directly on the face of the detectors, filters of varying thicknesses were needed, which required multiple lithographic processes. To overcome this challenge, in this work, we use a continuously variable filters deposited by a single-step electron-beam evaporation technique. We demonstrate a novel, to our knowledge, method that utilizes the glancing angle deposition technique with a continuously varying angle in order to produce tens of variable Fourier filters in a single deposition run. To prove this technique, we deposit this variable filter on a 38-channel linear detector and show the results from this device.