Abstract
The advanced chemical vapor deposition (CVD) technique has been developed for rapid formation of a superconducting oxide tape on long flexible substrates. In this system, tetrahydrofran (THF) solution of Y, Ba and Cu precursors was slowly injected to a vaporizer using a liquid mass flow controller (LMFC) with argon carrier, and generated gas including source metals was continuously carried to a CVD reactor with oxygen. Furthermore, this system has a long substrate conveying equipment. The long superconducting YBa2Cu3Ox (YBCO) film could be obtained by this system on Hastelloy C-276 substrate with yttrium stabilized zirconia (YSZ) buffer. The critical temperature (Tc) defined by zero resistance was exceeding a liquid N2 temperature and a best tape had a Tc=84K and a critical current density (Jc) of 2.1×104A/cm2 at 77K, 0Tesla.
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