Abstract
The separation of graphene grown on metallic catalyst by chemical vapor deposition (CVD) is essential for device applications. The transfer techniques of graphene from metallic catalyst to target substrate usually use the chemical etching method to dissolve the metallic catalyst. However, this causes not only high material cost but also environmental contamination in large-scale fabrication. We report a bubble transfer method to transfer graphene films to arbitrary substrate, which is nondestructive to both the graphene and the metallic catalyst. In addition, we report a type of metallic catalyst, which is 700 nm of Cu on sapphire substrate, which is hard enough to endure against any procedure in graphene growth and transfer. With the Cr adhesion layer between sapphire and Cu film, electrochemically delaminated graphene shows great quality during several growth cycles. The electrochemical bubble transfer method can offer high cost efficiency, little contamination and environmental advantages.
Highlights
Graphene, a two-dimensional honeycomb structure of carbon isotopes, is receiving worldwide attention due to its superior quality, such as high carrier mobility, excellent strength and high thermal conductivity [1,2]
MO, USA, item no. 248614, ACS reagent, 98.0%) solution to clean and etch the contaminants on the surface of the Cu foil; (ii) 700 nm Cu film on c-plane sapphire and (iii) 700 nm Cu film on adhesion layer (15 nm Cr) coated c-plane sapphire were prepared by using electron-beam evaporator
When there is an unattached region between the target substrate and the graphene, the graphene is teared and scratched during the process to dissolving and the graphene, the graphene is teared and scratched during the process to dissolving poly-methyl methacrylate (PMMA) [16,17,18]
Summary
A two-dimensional honeycomb structure of carbon isotopes, is receiving worldwide attention due to its superior quality, such as high carrier mobility, excellent strength and high thermal conductivity [1,2]. The conventional method of transferring graphene essentially involves a chemical etching step to remove the metal substrate, which causes environmental pollution and damage to graphene, as well as an increase in the production cost [6]. Bubble-transfer method, which use electrochemical reaction to delaminate graphene from catalyst metal, was reported [7,8,9,10]. In this way, it is possible to save metal catalyst to synthesize graphene by re-using the catalyst. It is possible to save metal catalyst to synthesize graphene by re-using the catalyst This method (conventionally using Cu foil of about 25 μm thickness) can cause other damages to the
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