Abstract

In recent years, heavy metal contaminants have become increasingly significant in almost all areas of application of high-purity gases. The analysis of these contaminants is still in the early stages and has proved inadequate, regarding the importance of the contaminations. The methods described are an attempt to address the problem but do not represent the final solution. For model system Fe in HCl three different analytical systems to analyse the heavy metal content of reactive gases were developed and described:

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