Abstract
The electrical characteristics of titanium nitride (TiN x ) contacts to n- and p-type GaN films, deposited by reactive magnetron sputtering at room temperature, are investigated. The contacts of TiN x to n-type GaN are ohmic and to p-type GaN are rectifying, while their properties are strongly dependent on the stoichiometry of the deposited titanium nitride layer. It is shown that the ohmic behavior of the contacts is associated with the presence of a high density of interface states and not to the low Schottky barrier.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
