Abstract
A contactless surface acoustic (SAW) wave device and its application as gas sensor is presented. The surface acoustic wave is excited and detected inductively, so that no bonding wires are required. In order to show the suitability of this type of device for sensor applications, we present several measurements in different temperature regimes. For the detection of organic solvents at room temperature the device was coated with polyepichlorhydrine (PECH), for the detection of NO 2 it was coated with copper phthalocyanine (CuPc), and for the detection of methane in the temperature region from 300°C to 450°C it was coated with SnO 2.
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