Abstract
Contact resonance force microscopy (CRFM) is an atomic force microscopy (AFM) method that evolved from a curiosity about the detection of ultrasonic vibrations with an AFM cantilever and an unaddressed need to characterize the mechanical properties of stiffer materials (elastic modulus >50 GPa). The method has matured to allow near-surface and subsurface elastic property measurements of single crystals, thin films, nanomaterials, composites, and other advanced materials. More recently, CRFM has been extended to viscoelastic property measurements, where the CR frequency and CR quality factor are utilized to quantitatively assess properties such as storage modulus, loss modulus, and loss tangent. In this Perspective, we trace the evolution of CRFM from initial discovery to elastic property measurements to viscoelastic property measurements. The techniques for extending single-point property measurements to two-dimensional property maps are then described in terms of their operational characteristics, demons...
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