Abstract

In this paper, a 3D metal-graphene contact with different contact structures (i.e., embedded contact and edge contact) is studied using Kirchhoff model. The influences of some major factors, including metal resistivity, metal-graphene contact resistivity and sheet resistances of graphene both in the channel and under metal, on the total contact resistance are investigated. The sheet resistance of graphene under metal has much more effect on the total contact resistance than other factors. Methods for creating low resistance contact are also proposed.

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