Abstract

The viability of four organic polymers (S1808, SC200, SU8 and Cyclotene) as fillingmaterials to achieve planarization of ensemble nanowire arrays is reported. Analysis of theporosity, surface roughness and thermal stability of each filling material was performed.Sonication was used as an effective method to remove the tops of the nanowires (NWs) toachieve complete planarization. Ensemble nanowire devices were fully fabricated andI–V measurements confirmed that Cyclotene effectively planarizes the NWs while still servingthe role as an insulating layer between the top and bottom contacts. These processes andanalysis can be easily implemented into future characterization and fabrication of ensembleNWs for optoelectronic device applications.

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