Abstract
Graphical abstractDisplay Omitted Highlights? An accurate method to characterize nanoobject-metal line contacts is presented. ? The contact end resistance test structure is adapted from microelectronics. ? The measurement of an individual nanocontact is allowed. ? Contact resistivity allows prediction of contact resistance for any contact size. This paper presents an accurate method and test structure to evaluate ohmic nanocontacts. The procedure permits the characterization of the contact resistance between standard-in-microtechnology interconnect lines and a certain nanoscaled-in-width object. It is based on the adaption of the classic contact end resistance structure used for the measurement of the contact end resistance in microelectronic technologies. After the theoretical model study, the methodology is validated for the single-walled carbon nanotube case.
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