Abstract

A comprehensive model on the dynamics of a tilted tapping mode atomic force microscopy (AFM) is presented, which includes the multimodal analysis, mode coupling mechanisms, adhesion, contact and friction forces induced by the tilting angle. A displacement criterion of contact/impact is proposed to eliminate the assumptions of the previous models such as infinite stiffness of sample or zero impact velocity, which makes the model presented here suitable for more general AFM application scenario, especially for the soft sample case. The AFM tip mass, tip–sample damping, contact forces and intermittent contact can all induce the higher modes participation into the system motion. One degree of freedom or one mode study on the AFM contact dynamics of tapping mode is shown to be inaccurate. The Hertz and Derjaguin–Muller–Toporov models are used for the comparison study of the non-adhesive and adhesive contacts. The intermittent contact and the contact forces are the two major sources of the system nonlinearity. The rich dynamic responses of the system and its sensitivity to the initial conditions are demonstrated by presenting various subharmonic and nonperiodic motions.

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