Abstract
A multilayered-mirror (MLM) monochromator beam line designed specially for synchrotron radiation (SR) stimulated process experiments has been constructed for the first time. The beam line was designed by the criteria; a beam spot size on the sample surface ⩾3×3 mm2, a density of total irradiated photons ⩾1018 photons/cm2 (for an irradiation time of a few tens of minutes to a few hours), and low-energy background ⩽1% of the output. The performance of the beam line was evaluated by measuring the transmitted photon flux of an Al filter around the Al L2,3 absorption edge and by measuring the photoemission spectra of Ta using the output beam as an excitation light source. The Al thin film deposition was successfully demonstrated by using the monochromatized output beam. We conclude that this MLM monochromator performs sufficiently well to study the excitation energy dependence in SR-stimulated processes.
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