Abstract
A parallel-plate plasma polymerization reactor operating at radio frequency was constructed. The reactor is suitable for reproducible plasma deposition of ultrathin pinhole-free polymer layers onto various supports. Feed gas composition, plasma power, total gas flow, pressure, and substrate temperature can be selected independently of each other. The radio-frequency voltage applied to the excitation electrode can be measured. Optical plasma emissions registered by a spectroscope may be used to monitor the plasma process.
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