Abstract

At the Hefei Synchrotron Radiation Laboratory (HESYRL), beamline 6A is dedicated to soft x-ray imaging studies. We are constructing a prototype scanning soft x-ray microscope. An effort in the fabrication of microzone plate has been started. We have designed and fabricated the first Fresnel zone plate as a microzone plate in China. Our microzone plates are fabricated by UV exposure. The finest width of the outmost zone is about 0.5 micrometers . In this paper, we describe the design and fabrication of our microzone plate and report first results.

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