Abstract
AbstractNanocrystalline V‐Al‐C‐N hard coatings were deposited without substrate bias by reactive r.f. magnetron sputtering from a segmented target, composed of ceramic VC and AlN pieces, following a combinatorial materials science approach. In each experiment, six coatings of different compositions and microstructures were obtained simultaneously by placing six substrates in individual positions relative to the target. The Ar gas flow was kept constant while the CH4 gas flow was systematically varied from 0 to 5 sccm corresponding to CH4 contents of 0–8% of total Ar + CH4 flow in order to study the formation of nanocrystalline, metastable and nanocomposite phases and the influence of the carbon content on the coatings constitution and mechanical properties by EMPA, XRD, nanoindentation and ball‐on‐disk tribometer tests.
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