Abstract
A low temperature oxygen corona discharge technique, previously used to relax the stresses developed in planar oxides, has been used to grow films on two‐dimensional structures at temperatures ≤900°C in dry . The resulting oxide films are found to be much more conformal (uniform) around both convex and concave surfaces than those found for thermally grown oxides. It is postulated that the corona oxidation relaxes oxide network strains which reduce the interface reaction rate constant for both convex and concave cases and which block diffusion of oxidant in the concave case.
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