Abstract
This paper presented a conformal smoothing theory, and smoothing capability evaluation was established on the proposed theory. According to pressure distribution model, processing parameters have been optimized and the CPP sample with a size of 340 × 340 mm was applied in conformal smoothing. The middle spatial frequency was effectively corrected with the total polishing time of 750 min, and energy was constringed 32.2 times (improved from 57.68 nm2·mm to 1.79 nm2·mm). Meanwhile, surface roughness RMS (root mean square) maintained at the same scale (changed from 265.4 nm to 265.2 nm). Parametric conformal smoothing was proven to be an effective method to control the middle spatial frequency error of CPPs.
Highlights
Continuous phase plate (CPP) with continuously varying topographical microstructures is a typical diffractive optical element, and it has wide spread applications in modern optics field of beam shaping, compensation and modulation[1,2] CPPs surface have spatial microstructure, fractal surface, and large grads, which are different from traditional optics and common microstructure array component
Magnetorheological finishing (MRF) has a few matters lead to mid-to-high spatial frequency error:[7,8,9,10] (1) removal function fluctuation including removal function size or removal efficiency fluctuation
The mid-to-high spatial frequency error on CPPs surface leads to serious problems such as grating effect and far-field light intensity modulation
Summary
Continuous phase plate (CPP) with continuously varying topographical microstructures is a typical diffractive optical element, and it has wide spread applications in modern optics field of beam shaping, compensation and modulation[1,2] CPPs surface have spatial microstructure, fractal surface, and large grads, which are different from traditional optics and common microstructure array component. The optimized tool was applied in the smoothing of 340 mm × 340 mm CPP, where mid-to-high spatial frequency errors were effectively controlled. (1) K′ can describe the smoothing effects of different spatial frequency surface errors with variant smoothing tool.
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