Abstract
Particulate matter (PM) is a category of airborne pollutants, and fine particles that have a diameter of 2.5 μm (PM2.5) or smaller are especially damaging to human health because of their ability to penetrate deep into our respiratory system, Therefore, Monitoring of PM is very important. In this work, an air micro- fluidic PM sensor based on MEMS was proposed, and numerical model of the sensor was simulated accurately. The sensor was able to separate particles according to their sizes, and then transports and deposits the selected particles using thermophoretic precipitation onto the surface of a microfabricated mass-sensitive film bulk acoustic resonator (FBAR), precisely weighing and providing the concentration of PM. The PM sensor has double stage separation function, and the primary separator can separate the particles with size of less 10 μm from the particles, and the secondary can separate particles with size of less 2.5 μm from the particles.
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