Abstract
The results of a study of irreversible changes induced at surfaces of metals, semiconductors, and insulators by extreme ultraviolet (λ<100nm) ultrashort pulses provided by TESLA Test Facility Free-Electron Laser, Phase 1 (TTF1 FEL) are reported and discussed. The laser was tuned at 86, 89, and 98nm during the experiments reported here. Energy spectra of ions ejected from the irradiated surfaces are also reported. Special attention is paid to the difference in the ablation behavior of (semi)conductors and insulators that we have observed. The difference is dramatic, while the absorption coefficients are similar for all materials at the TTF1 FEL wavelength.
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