Abstract
The results of investigations of , thin films as prospective materials for conductive SPM probes in a silicon cantilever are presented. The ultrathin (1.5-10 nm) films are characterized by high conductivity, increased adhesion to silicon and chemical passivity. It is shown by means of conductive SPM measurements that there is no dielectric layer on the film surface and the conductive metal-coated silicon cantilevers were wear-proof.
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