Abstract

A novel non-contact micro manufacturing technology of aerosol deposition is presented to fabricate conductive micro silver wires with width of several micrometers from silver inks. The ceramic nozzle with inner diameter of 250 μm is utilized to print the micro silver wires, the width of wires ranges from 15 μm to 70 μm and the thickness ranges from 200 nm to 2 μm. The printed silver wires are cured to decrease the resistance. High curing temperature and long curing time result in better conductivity of deposited wires due to the sufficient melt and combine of sliver particles. The minimum resistivity of 3.32 μΩ·cm is demonstrated for a continuous track cured at 300°C.

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