Conduction mechanism of Schottky contacts fabricated on etch pits originating from single threading dislocation in a highly Si-doped HVPE GaN substrate

Abstract

This paper reports the relationship between a single dislocation structure and current leakage mechanism observed in a Pt/n+-GaN Schottky contacts with the combined use of transmission electron microscopy (TEM) and conductive atomic force microscopy (C-AFM). The contacts were fabricated on a substrate grown by hydride vapor phase epitaxy. TEM analysis clarified that large- and small-size etch pits are attributed to mixed/screw and edge dislocations, respectively. Schottky contacts formed on the surfaces of large and small etch pits (L-EPC, S-EPC), a dislocation-free flat area (FLAT), and a Schottky barrier diode with a diameter of 50 μm (SBD) were prepared and their temperature-dependent current-voltage characteristics were measured using C-AFM. Analysis of the forward bias characteristics revealed that the Schottky barrier height increased and the ideality factor approached unity with increasing temperature. Such temperature dependence of the barrier height was well explained by barrier inhomogeneity at the metal/semiconductor interface. From the analysis of the reverse bias characteristics, we found that field emission (FE) currents caused by the high donor concentration of the sample were the dominant conduction mechanism for S-EPC and FLAT. On the other hand, for L-EPC, the FE currents were overlapped by Poole-Frenkel emission (PFE) currents. For SBD, the leakage currents were successfully explained by the FE and thermionic field emission (TFE) mechanisms by assuming dislocation regions with a lowered barrier height. These findings suggest that mixed dislocations are associated with PFE and lower the Schottky barrier.