Abstract
This paper demonstrates that the electrical properties of suspended graphene nanomesh (GNM) can be tuned by systematically changing the porosity with helium ion beam milling (HIBM). The porosity of the GNM is well-controlled by defining the pitch of the periodic nanopores. The defective region surrounding the individual nanopores after HIBM, which limits the minimum pitch achievable between nanopores for a certain dose, is investigated and reported. The exponential relationship between the thermal activation energy (EA) and the porosity is found in the GNM devices. Good EA tuneability observed from the GNMs provides a new approach to the transport gap engineering beyond the conventional nanoribbon method.
Highlights
Graphene provides a unique two-dimensional (2D) electron system, which has attracted significant attention in recent years [1,2,3]
By micromachining the graphene into graphene nanoribbons (GNRs), an energy gap can be observed by measuring the nonlinear conductance at room temperature, which is created by the lateral confinement of the carriers [15,16,17,18]
The graphene nanomesh (GNM) is generated by introducing nanopores periodically on a graphene sheet, which forms a new crystalline network based on the original crystal
Summary
Graphene provides a unique two-dimensional (2D) electron system, which has attracted significant attention in recent years [1,2,3]. Modifying the lattice structure of graphene by irradiation to induce defects can open the transport gap and tune the conduction of graphene [19,20,21]. TThheenn tthhee ssttrruuccttuurraallllyy ccoonnttrroolllleedd ggrraapphheennee nnaannoommeesshh ppaatttteerrnniinngg bbyy ffooccuusseedd hheelliiuumm iioonn bbeeaamm iiss ddiissccuusssseedd. TThhee eelleeccttrrooddeess ppaatttteerrnniinngg wwaass sseeppaarraatteedd iinnttoo ttwwoo mmaaiinn sstteeppss. TChreann5d n7m0 nCmr aAnud w70ernemdAepuowsiteerde deposited by E-beam evaporation to form the electrodes overlapping the previous electrodes and the CVD graphene (Figure 2c). Micromachines 2020, 11, 387 by E-beam evaporation to form the electrodes overlapping the previous electrodes and the CVD graphene (Figure 2c). The graphene nanoribbons (GNRs) were patterned by EBL with hydrogMeicnrosmialcsheinseqs u20i2o0x, 1a1n, xe (HSQ). Material information: CVD graphene SiO2 (285 nm) Silicon (substrate) Gold (MLA in “first step”) Gold (EBL in “first step”) Gold (EBL in “Second step”) HSQ (e)
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
