Condition-number-based measurement configuration optimization for nanostructure reconstruction by optical scatterometry

Abstract

The quality of the measured signature is influenced not only by the instrument’s precision but also by the selected measurement configuration. In optical scatterometry, the purpose of measurement configuration optimization (MCO) is to select an optimal or suboptimal combination of measurement conditions, such as the angles of incidence, azimuth, polarization and wavelength, to achieve higher measurement accuracy. This analysis not only requires an effective optimization strategy but is also time-consuming. In this work, we propose a general MCO method that incorporates error propagation theory and condition-number-based error estimation technique, by which the MCO problem can be formulated as an optimization problem for the condition number of the coefficient matrix in the linear estimation of parameter deviations. The method is demonstrated on a multi-wavelength Mueller matrix scatterometry measuring a Si grating. With the help of the neural-network-based surrogate model, the feasibility of the method is verified by making a comparison with Latin hypercube sampling. Fitting results of the measured and calculated Mueller matrix spectra obtained at the selected optimal measurement configuration show a good agreement. The proposed method is promising to provide an alternate solution to globally evaluate the MCO problem in optical scatterometry and other measurement scenarios.