Condensed phase equilibria in the metal-In-P systems

Abstract

Ternary phase diagrams have proven valuable for understanding the reactions between a metal contact and a compound semiconductor, as well as for choosing thermally stable electrical contacts in thermodynamic equilibrium with the semiconductor. Since InP is important for both optoelectronic and electronic devices, the metal-In-P systems are of particular interest. In this work, new portions of isothermal sections of the (Rh, Ir, Ru, Os)-In-P diagrams are presented. Then, since no compilation of the published metal-In-P phase diagrams is available, the diagrams are reviewed here. The features of these diagrams are discussed in terms of the thermodynamics of the metal-In-P systems, particularly the considerable thermodynamic stability of many of the transition metal phosphides. Finally, some of the phases in thermodynamic equilibrium with InP, particularly PdIn and Ni2P, are highlighted for their potential for high-temperature contacts to InP.