Abstract
In modern Scanning Electron Microscopes (SEM) a large variety of different signals is collected to create images with various contrasts or to receive compositional information. Among others, Backscattered Electrons (BSE) and characteristic X-rays belong to the major signals which are collected routinely. Both give information about the sample composition and therefore complement each other very good as exemplarily shown in Figure 1. Since electrons and photons follow a straight path out of the sample the collection efficiency is weak if the detectors are far away from the sample resulting in a small solid angle in which they are collected. Hence, in order to collect them with high efficiency modern BSE and Energy Dispersive X-Ray (EDX) detectors use large active areas and are positioned close to the sample.
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