Abstract
For researchers wishing to generate an understanding of complex plasma systems, global models often present an attractive first step, mainly due to their ease of development and use. These volume averaged models are able to give descriptions of plasmas with complex chemical kinetics, and without the computationally intensive numerical methods required for spatially resolved models. This paper gives a tutorial on global modeling, including development and techniques, and provides a discussion on the issues and pitfalls that researchers should be aware of. Further discussion is provided in the form of two reviews on methods of extending global modeling techniques to encompass variations in either time or space.
Highlights
Low temperature plasmas have a large number of scientific and commercial applications, so an understanding of their properties is important for optimization of plasma based processes and technologies
Similar points could be raised regarding electron impact cross sections. These issues surrounding fundamental input data are common to all plasma modeling approaches; they take on special significance in global models where the primary aim is often to understand systems comprising of complex chemistries
It is known that low pressure inductively coupled plasmas (ICPs) produced in electronegative gases, such as those typically used in plasma processing applications, are susceptible to temporal instabilities, which depend on the operating pressure, discharge power, and feed gas.[9,16,17,119,120]
Summary
Low temperature plasmas have a large number of scientific and commercial applications, so an understanding of their properties is important for optimization of plasma. A commercial application, Quantemol-P, is built around GlobalKin to provide a graphical user interface for increased usability.[3] Another powerful tool is ZDPlasKin, which is able to solve for the time evolution of species densities in a system with a user defined reaction scheme.[4] As with GlobalKin, it includes a solver for the EEDF, and is able to calculate gas temperatures The outputs of both ZDPlasKin and GlobalKin are compatible with the PumpKin pathway analysis software.[5] The plasma modelling toolkit PLASIMO provides users with a framework to create a global model.[6] Despite these tools existing, and usually being easy to use, it is still sometimes desirable to create a global model of a particular system.
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