Concepts and focus point for intelligent sensor systems

Abstract

This paper discusses the state-of-the-art and current trends in the design of intelligent low-cost high-performance sensor systems. In these systems the functions of the sensors, actuators, analog interfacing circuits and microcontrollers are merged in overall designs which have been implemented, where technology allows, on common substrates. Important properties which can act as focus points for an intelligent design are: adaptability, accuracy, dynamic range, speed, power consumption, reliability and costs. The functions of A/D converters are re-evaluated and novel conversion methods presented. Some important aspects of data processing and data communication are discussed. Examples of intelligent sensor systems are given in two areas: smart temperature sensors which can detect the presence of micro-organisms in food products by sensing the temperature rise of the products with a resolution of 5 mK, and capacitive displacement transducers which can accurately sense position, speed and acceleration by measuring the (trans)capacitances in multi-electrode structures.