Abstract
In this study, piezoelectric micropumps with partial throw-away design have been developed and discussed. The actuator, a rectangular piezoelectric plate, can be separated from the pump body and be used repeatedly while the pump chamber is single-use to prevent infection. Thus, a low cost and waste solution for biomedical uses is achieved. A mechanical model is used to analyze the behavior of pump diaphragm and chamber geometry. Pump chamber with 20mm diameter is used due to its moderate elasticity. Then, 5 pumps with different depth of pump chamber have been made. The maximum flow rate, 5.7g/min, is reached by using a 0.5mm pump chamber with a 200V actuated voltage.
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