Abstract
In ultraprecision machining technology, manufacture of more precise and large elements is expected. The author proposed a new system, named workpiece-referred form accuracy control system (WORFAC), and confirmed an effectiveness of this manufacturing method on a waviness improvement. In this report, we propose a new system with WORFAC, which has three control systems; a waviness control system, a figure control system, and a surface roughness control system. So far, basic studies on the figure and surface roughness control systems are carried out. And the possibility of this new system is confirmed.
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