Abstract
This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor (Q) further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5λ, and 3λ effectively reduce the vibration displacement.
Highlights
It is noted that operating frequency, and design of resonator play an important role in the performance and improving the quality factor of resonators
Quality Q of the MEMS resonators has improved with phononic crystals extended to two dimension (2D)
Many researcher employed phononic crystals with resonators’ body to improved quality of resonators, such as square shaped lattice PnC with hole employ with a resonator [26] gives quality 90,000, optimally shaped MEMS resonator [27] gives the quality 105,000, Cross shaped PnC MEMS resonator [23] gives 221,536, and gallium arsenide resonator [28] gives the quality of 6 million
Summary
Micro-Electro-Mechanical-Systems (MEMS) components have been widely used in the field of engineering science, and technology because of their high efficiency, miniature in size, low power consumption, and low cost fabrication [1,2,3,4,5,6,7]. To obtain the wide band gap, a lot of PnC structures have been designed [17,18,19,20,21,22,23,24,25], and applied to resonators of different shapes [18,19,20,22]. We have designed and simulated the novel annular splits rings resonators with supporting tethers of width 4 μm to find the quality factor and investigated the displacement pattern and axes displacement of resonator, we have applied one dimensional phononic crystal (1D PnC) strips, and two dimensional phononic crystal (2D PnC) strips to annular splits rings resonators for further reduction of energy leakage and enhancement of the quality Q of resonator. We have investigated (x, y, z) displacement of resonator through FEA (Finite Element Analysis) simulation
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