Abstract
Antimony implants at 40 keV and at a dose of 4 × 1014 cm−2 have been characterized for their potential use in n-type shallow junction formation. The electrical characterization was done using sheet resistivity and Hall effect measurements. High electrical activities (>80%) and low sheet resistance values (<200 Ω/□) were obtained for annealing temperatures below 800 °C. A novel differential Hall effect technique was used to obtain doping profiles at a depth resolution down to 1 nm, with a comparison made between these and Rutherford backscattering (RBS) measurements of the atomic profile as a function of annealing temperature. The antimony shows insignificant diffusion for annealing temperatures of 800 °C and below, with junction depths of about 60 nm. Electrical activation correlates well with the substitutional fraction of antimony determined by RBS.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
