Abstract

Summary form only given. Recent advances in the field of micro-electromechanical systems (MEMS) have made MEMS based micro-optical switches a promising technology. Optical switches are a very important component in WDM optical fiber communication networks as they allow reconfiguration of the network and add/drop of selected WDM channels with little interference to other channels. One of the key components in MEMS switches is a mirror that directs the incident signal beam. This mirror is a movable structure usually fabricated by surface micromachining. Mirror non-flatness is known to increase the insertion loss and crosstalk in MEMS micro-optical switches. In this paper, we propose a simple model to compute the insertion loss and crosstalk caused by non-flatness and present some representative numerical examples.

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