Abstract
The proposed model includes two stages of growth. For the initial stage we apply a modified ballistic aggregation model including angular distribution of oncoming atoms, a capture radius greater than the atomic radius due to atomic attraction, atomic relaxation as well as surface diffusion due to thermally induced hopping. The appropriate model parameters correspond to sputter gas pressure, incident particle energy and substrate temperature in experimental situations. This model describes such morphological features as loose bonding of the hillock to the surrounding film, fan-like internal structure of the hillock, the runaway growth at early stages and the overall shape quite well. For advanced stages of growth the atomic shadowing mechanism becomes less effective and it will be replaced by global (geometric) shadowing. Then the macroscopic shape of a hillock can be fitted by choosing the appropriate angular distribution of oncoming atoms in the framework of geometric shadowing.
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