Abstract
The electron optical requirements for e-beam testing of integrated circuits are briefly reviewed. The computer simulation of the electron optical components of such systems is then described and illustrated, including the high-brightness electron gun, the lens and deflection system for the low-voltage primary beam optics, and the voltage contrast detector. The effects of local fields at the specimen surface are also briefly discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
