Abstract
The recently developed Monte Carlo program CASSIS for the simulation of channeling phenomena was upgraded in order to enable the generation of energy spectra for Rutherford backscattering in channeling conditions. The basic concepts of the module added are described and discussed. The feasibility of the program is demonstrated by comparing experimental and simulation results for simple bulk materials like diamond and silicon as well as for the trigonal lithium niobate lattice. For all three cases excellent agreement between experiment and calculation were obtained. Additionally spectra measured for a fully strained Si0.75Ge0.25 layers on silicon, which show interesting channeling effects, e.g. catastrophic dechanneling were successfully simulated.
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