Abstract
Sputtering of copper, nickel and alumium polycrystalline targets by 40 keV Ar + ions is simulated by a NIARLOWE-based computer code. Angle-of-incidence dependence of sputtering yields and depth-of-origin distributions are calculated. The angular distributions and energy spectra of sputtered particles are similar to those found earlier for low-energy sputtering.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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