Computer analysis of the AFM images of the nanopore system on the SiO2/Si structure surface, obtained by Zn ion implantation

Abstract

A computer study of morphological characteristics using AFM images of a self-organized surface nanopore system in the structure of SiO2/Si(100) is performed. The nanopore system is obtained via Zn ion doping with subsequent thermal annealing. AFM images of the nanopore system are studied using the STIMAN 3D software. A correct quantitative estimate is made of the morphology of this nanopore system using a number of parameters (equivalent diameter, area, total area, and shape coefficient). Estimating the morphology of the self-organized surface nanopore system in the structure of SiO2/Si(100) allows us to narrow the possible practical applications of the resulting system in opto- and nanoelectronics.